Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11043375 | Plasma deposition of carbon hardmask | Yang Yang, Eswaranand Venkatasubramanian, Kartik Ramaswamy, Kenneth S. Collins, Gonzalo Monroy +2 more | 2021-06-22 |
| 11043387 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Kenneth S. Collins, Gonzalo Monroy, Yue Guo | 2021-06-22 |
| 10957518 | Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece | Kartik Ramaswamy, Lawrence Wong, Yang Yang, Srinivas D. Nemani, Praburam Gopalraja | 2021-03-23 |