Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177164 | Self-aligned high aspect ratio structures and methods of making | Susmit Singha Roy, Abhijit Basu Mallick, Srinivas Gandikota | 2021-11-16 |
| 11049537 | Additive patterning of semiconductor film stacks | John O. Dukovic, Srinivas D. Nemani, Ellie Yieh, Steven Hiloong WELCH, Bhargav S. Citla | 2021-06-29 |
| 10957518 | Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece | Kartik Ramaswamy, Lawrence Wong, Steven Lane, Yang Yang, Srinivas D. Nemani | 2021-03-23 |