Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114306 | Methods for depositing dielectric material | Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2021-09-07 |
| 11049537 | Additive patterning of semiconductor film stacks | John O. Dukovic, Srinivas D. Nemani, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH | 2021-06-29 |
| 11049731 | Methods for film modification | Erica Chen, Chentsau Chris Ying, Jethro Tannos, Matthew August Mattson | 2021-06-29 |
| 10950429 | Methods of forming amorphous carbon hard mask layers and hard mask layers formed therefrom | Mei-Yee Shek, Srinivas D. Nemani | 2021-03-16 |