Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145808 | Methods for etching a structure for MRAM applications | Jong Mun Kim, Minrui Yu, Chando Park, Mang-Mang Ling, Jaesoo Ahn +3 more | 2021-10-12 |
| 11049731 | Methods for film modification | Erica Chen, Bhargav S. Citla, Jethro Tannos, Matthew August Mattson | 2021-06-29 |
| 10957548 | Method of etching copper indium gallium selenide (CIGS) material | Mang-Mang Ling, Jong Mun Kim | 2021-03-23 |
| 10916433 | Methods of forming metal silicide layers and metal silicide layers formed therefrom | He Ren, Maximillian Clemons, Mei-Yee Shek, Minrui Yu, Bencherki Mebarki +2 more | 2021-02-09 |