Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101174 | Gap fill deposition process | Hao Jiang, Nikolaos Bekiaris, Mehul Naik | 2021-08-24 |
| 11049731 | Methods for film modification | Chentsau Chris Ying, Bhargav S. Citla, Jethro Tannos, Matthew August Mattson | 2021-06-29 |
| 10964527 | Residual removal | Jong Mun Kim, Biao Liu, Cheng Pan, Chentsau Ying, Srinivas D. Nemani +1 more | 2021-03-30 |
| 10892161 | Enhanced selective deposition process | Biao Liu, Cheng Pan, Srinivas D. Nemani, Chang Ke, Lei Zhou | 2021-01-12 |