Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114306 | Methods for depositing dielectric material | Bhargav S. Citla, Jingyi Li, Douglas A. Buchberger, Jr., Zhong Qiang Hua, Srinivas D. Nemani +1 more | 2021-09-07 |
| 11049731 | Methods for film modification | Erica Chen, Chentsau Chris Ying, Bhargav S. Citla, Matthew August Mattson | 2021-06-29 |