Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114306 | Methods for depositing dielectric material | Bhargav S. Citla, Jethro Tannos, Jingyi Li, Douglas A. Buchberger, Jr., Srinivas D. Nemani +1 more | 2021-09-07 |
| 11049701 | Biased cover ring for a substrate processing system | Adolph Miller Allen, William Johanson, Viachslav Babayan, Carl Johnson, Vanessa Faune +4 more | 2021-06-29 |