Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11056325 | Methods and apparatus for substrate edge uniformity | Thanh X. Nguyen, Alexander Jansen, Yana Cheng, Randal Dean Schmieding, Yong Cao +1 more | 2021-07-06 | $60,527,000 |
| 11049701 | Biased cover ring for a substrate processing system | Adolph Miller Allen, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson, Vanessa Faune +4 more | 2021-06-29 | $47,858,000 |
| 11024490 | Magnetron having enhanced target cooling configuration | Vanessa Faune, Kirankumar Neelasandra SAVANDAIAH | 2021-06-01 | $74,932,000 |