Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049701 | Biased cover ring for a substrate processing system | William Johanson, Viachslav Babayan, Zhong Qiang Hua, Carl Johnson, Vanessa Faune +4 more | 2021-06-29 |
| 11037768 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Martin Lee Riker, Keith A. Miller +4 more | 2021-06-15 |
| 10972280 | Blockchain for distributed authentication of hardware operating profile | Paul Kiely, Noufal Kappachali | 2021-04-06 |