Methods for depositing dielectric material

Assignee

• Applied Materials

Inventors

• Bhargav S. Citla (20 patents)
• Jethro Tannos (7 patents)
• Jingyi Li (36 patents)
• Douglas A. Buchberger, Jr. (121 patents)
• Zhong Qiang Hua (26 patents)
• Srinivas D. Nemani (236 patents)
• Ellie Yieh (178 patents)

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