Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101174 | Gap fill deposition process | Hao Jiang, Erica Chen, Mehul Naik | 2021-08-24 |
| 11043415 | Enhanced cobalt agglomeration resistance and gap-fill performance by ruthenium doping | Zhiyuan Wu, Mehul Naik, Jin-Hee Park, Mark Lee | 2021-06-22 |