Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Shuwei Liu, Wen Xiao, Vibhu Jindal | 2021-12-07 |
| 11033930 | Methods and apparatus for cryogenic gas stream assisted SAM-based selective deposition | Song-Moon Suh, Liqi Wu, Michael S. Jackson, Lei Zhou, Biao Liu +3 more | 2021-06-15 |
| 10950433 | Methods for enhancing selectivity in SAM-based selective deposition | Michael S. Jackson, Liqi Wu, Lei Zhou, Shuyi Zhang, David Thompson +3 more | 2021-03-16 |
| 10892161 | Enhanced selective deposition process | Biao Liu, Cheng Pan, Erica Chen, Srinivas D. Nemani, Lei Zhou | 2021-01-12 |