Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209727 | Ta—Cu alloy material for extreme ultraviolet mask absorber | Shuwei Liu, Abbas Rastegar | 2021-12-28 |
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Shuwei Liu, Chang Ke, Wen Xiao | 2021-12-07 |
| 11037769 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vishwas Kumar Pandey | 2021-06-15 |
| 11022876 | Extreme ultraviolet mask blank with multilayer absorber and method of manufacture | — | 2021-06-01 |