Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Shuwei Liu, Chang Ke, Vibhu Jindal | 2021-12-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Shuwei Liu, Chang Ke, Vibhu Jindal | 2021-12-07 |