Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209727 | Ta—Cu alloy material for extreme ultraviolet mask absorber | Vibhu Jindal, Abbas Rastegar | 2021-12-28 |
| 11194244 | Extreme ultraviolet mask absorber and processes for manufacture | Chang Ke, Wen Xiao, Vibhu Jindal | 2021-12-07 |