Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209727 | Ta—Cu alloy material for extreme ultraviolet mask absorber | Shuwei Liu, Vibhu Jindal | 2021-12-28 |
| 10935896 | Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof | — | 2021-03-02 |