Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124878 | Gas supply member with baffle | Kartik Shah, Kailash Pradhan, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2021-09-21 |
| 11077410 | Gas injector with baffle | Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2021-08-03 |
| D924825 | Chamber inlet | Eric Kihara Shono, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
| 11037769 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vibhu Jindal | 2021-06-15 |