Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124878 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Kailash Pradhan, Sairaju Tallavarjula, Rene George +2 more | 2021-09-21 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2021-08-03 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2021-08-03 |
| D924825 | Chamber inlet | Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Hansel LO +1 more | 2021-06-29 |