Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11124878 | Gas supply member with baffle | Kartik Shah, Vishwas Kumar Pandey, Sairaju Tallavarjula, Rene George, Eric Kihara Shono +2 more | 2021-09-21 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen +4 more | 2021-08-03 |
| 10892147 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Huy Q. Nguyen, Jian Li | 2021-01-12 |