Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Hyung Je Woo, Fei Wu | 2021-09-28 | $64,178,000 |
| 10892147 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2021-01-12 | $84,921,000 |