Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Hyung Je Woo, Fei Wu | 2021-09-28 |
| 10892147 | Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers | Sairaju Tallavarjula, Kailash Pradhan, Huy Q. Nguyen | 2021-01-12 |