Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Fei Wu, Jian Li | 2021-09-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133212 | High temperature electrostatic chuck | Abdul Aziz Khaja, Jun Ma, Fei Wu, Jian Li | 2021-09-28 |