| 11164737 |
Integrated epitaxy and preclean system |
Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo |
2021-11-02 |
| 11114289 |
Non-disappearing anode for use with dielectric deposition |
Michael S. Cox, Brian T. West |
2021-09-07 |
| 11077410 |
Gas injector with baffle |
Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more |
2021-08-03 |
| 11081340 |
Argon addition to remote plasma oxidation |
Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN +1 more |
2021-08-03 |
| 11049719 |
Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal |
Kin Pong Lo, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar |
2021-06-29 |
| 11004704 |
Finned rotor cover |
Chaitanya A. PRASAD, Emre Cuvalci |
2021-05-11 |
| 10971357 |
Thin film treatment process |
Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more |
2021-04-06 |
| 10948353 |
Thermal processing chamber with low temperature control |
Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more |
2021-03-16 |
| 10950698 |
Method and apparatus for selective nitridation process |
Matthew S. Rogers, Roger Curtis, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more |
2021-03-16 |
