Issued Patents 2021
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164737 | Integrated epitaxy and preclean system | Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez, Kin Pong Lo | 2021-11-02 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Michael S. Cox, Brian T. West | 2021-09-07 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Eric Kihara Shono, Kartik Shah, Christopher S. Olsen, Sairaju Tallavarjula +4 more | 2021-08-03 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN +1 more | 2021-08-03 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Kin Pong Lo, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 |
| 11004704 | Finned rotor cover | Chaitanya A. PRASAD, Emre Cuvalci | 2021-05-11 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10948353 | Thermal processing chamber with low temperature control | Samuel C. Howells, Wolfgang Aderhold, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2021-03-16 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Canfeng Lai, Bernard L. Hwang, Jeffrey Tobin +2 more | 2021-03-16 |