Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127620 | Electrostatic chuck for high temperature processing chamber | — | 2021-09-21 |
| 11017984 | Ceramic coated quartz lid for processing chamber | — | 2021-05-25 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Jeffrey Tobin +2 more | 2021-03-16 |