Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11114285 | Apparatus for exhaust cooling | Michael S. Cox, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho | 2021-09-07 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Michael S. Cox, Lara Hawrylchak | 2021-09-07 |
| 11072852 | Pre-conditioned chamber components | Lizhong Sun, William M. Lu | 2021-07-27 |
| 11056372 | Low temperature biasable substrate support | Soundarrajan JEMBULINGAM, Dinkesh HUDERI SOMANNA | 2021-07-06 |
| 11011356 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2021-05-18 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Ronald Vern Schauer, Roger M. Johnson, Michael S. Cox | 2021-02-23 |