Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11185815 | Plasma abatement of compounds containing heavy atoms | Monique McIntosh, Colin John Dickinson, Paul Fisher, Yutaka Tanaka, Zheng Yuan | 2021-11-30 |
| 11114285 | Apparatus for exhaust cooling | Brian T. West, Roger M. Johnson, Yan Rozenzon, Dinkesh Somanna, Dustin W. Ho | 2021-09-07 |
| 11114289 | Non-disappearing anode for use with dielectric deposition | Lara Hawrylchak, Brian T. West | 2021-09-07 |
| 11011356 | Sputtering target with backside cooling grooves | Brian T. West, Jeonghoon Oh | 2021-05-18 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Ronald Vern Schauer, Roger M. Johnson | 2021-02-23 |