Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075115 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Juwen Gao, Deqi Wang | 2021-07-27 |
| 11069535 | Atomic layer etch of tungsten for enhanced tungsten deposition fill | Chiukin Steven Lai, Keren Jacobs Kanarik, Samantha Tan, Anand Chandrashekar, Teh-Tien Su +2 more | 2021-07-20 |
| 10977405 | Fill process optimization using feature scale modeling | Michael J. Bowes, Atashi Basu, Kapil Sawlani, Dongyao Li, Anand Chandrashekar +1 more | 2021-04-13 |
| 10916434 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Anand Chandrashekar, Raashina Humayun | 2021-02-09 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Ronald Powell, Michael Rumer, Kaihan Ashtiani | 2021-01-19 |