Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Michal Danek, Michael Rumer, Kaihan Ashtiani | 2021-01-19 |