Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075115 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Michal Danek, Juwen Gao, Deqi Wang | 2021-07-27 |
| 10916434 | Feature fill with multi-stage nucleation inhibition | Deqi Wang, Anand Chandrashekar, Michal Danek | 2021-02-09 |