Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075115 | Tungsten feature fill | Anand Chandrashekar, Esther Jeng, Raashina Humayun, Michal Danek, Juwen Gao | 2021-07-27 |
| 10916434 | Feature fill with multi-stage nucleation inhibition | Anand Chandrashekar, Raashina Humayun, Michal Danek | 2021-02-09 |