Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11069051 | Transparent wafer center finder | — | 2021-07-20 |
| 10974363 | Monitoring of pneumatic connection to carrier head | — | 2021-04-13 |
| 10930479 | Smart chamber and smart chamber components | Simon Nicholas Binns, Brian T. West, Roger M. Johnson, Michael S. Cox | 2021-02-23 |