Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170998 | Method and apparatus for depositing a metal containing layer on a substrate | Xiaodong Yang, Mark William Covington, Vivek VINIT, Vishal AGRAWAL | 2021-11-09 |
| 11072852 | Pre-conditioned chamber components | Brian T. West, William M. Lu | 2021-07-27 |