Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189485 | Steam oxidation initiation for high aspect ratio conformal radical oxidation | Taewan Kim | 2021-11-30 |
| 11087979 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2021-08-10 |
| 11077410 | Gas injector with baffle | Vishwas Kumar Pandey, Lara Hawrylchak, Eric Kihara Shono, Kartik Shah, Sairaju Tallavarjula +4 more | 2021-08-03 |
| 11081340 | Argon addition to remote plasma oxidation | Hansel LO, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2021-08-03 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2021-03-16 |
| 10886122 | Methods for conformal treatment of dielectric films with low thermal budget | Heng Pan, Matthew S. Rogers | 2021-01-05 |