Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11091835 | Side inject nozzle design for processing chamber | Martin John Ripley | 2021-08-17 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Hansel LO, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
