Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081340 | Argon addition to remote plasma oxidation | Christopher S. Olsen, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2021-08-03 |
| D924825 | Chamber inlet | Eric Kihara Shono, Vishwas Kumar Pandey, Christopher S. Olsen, Agus Sofian Tjandra, Taewan Kim +1 more | 2021-07-13 |
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Christopher S. Olsen, Agus Sofian Tjandra, Eric Kihara Shono +1 more | 2021-06-29 |