Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087979 | Cleaning method | Christopher S. Olsen, Peter Stone, Teng-Fang Kuo, Manoj Vellaikal | 2021-08-10 |
| 11088000 | Wafer based corrosion and time dependent chemical effects | Leonard Tedeschi, Benjamin Schwarz, Changhun Lee, Adauto Diaz, Daniel T. McCormick | 2021-08-10 |