Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886122 | Methods for conformal treatment of dielectric films with low thermal budget | Matthew S. Rogers, Christopher S. Olsen | 2021-01-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886122 | Methods for conformal treatment of dielectric films with low thermal budget | Matthew S. Rogers, Christopher S. Olsen | 2021-01-05 |