Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164737 | Integrated epitaxy and preclean system | Lara Hawrylchak, Schubert S. Chu, Tushar Mandrekar, Errol C. Sanchez | 2021-11-02 |
| 11049719 | Epitaxy system integrated with high selectivity oxide removal and high temperature contaminant removal | Lara Hawrylchak, Errol C. Sanchez, Schubert S. Chu, Tushar Mandrekar | 2021-06-29 |
| 10971357 | Thin film treatment process | Wei Liu, Theresa Kramer Guarini, Linlin Wang, Malcolm J. Bevan, Johanes S. Swenberg +4 more | 2021-04-06 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |