Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zhiyuan Ye, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zhiyuan Ye, Joseph M. Ranish +3 more | 2021-06-01 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong, Anzhong Chang +10 more | 2021-02-23 |