Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177144 | Wafer spot heating with beam width modulation | Zhiyuan Ye, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11060203 | Liner for epi chamber | Mehmet Tugrul Samir, Aaron Miller | 2021-07-13 |
| 11021795 | Multi zone spot heating in epi | Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Zhiyuan Ye, Joseph M. Ranish +3 more | 2021-06-01 |
| 10995419 | Methods and apparatus for gallium nitride deposition | Brian H. Burrows, Ala Moradian, Kartik Shah | 2021-05-04 |