Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11162168 | Substrate positioning apparatus and methods | Travis Tesch | 2021-11-02 |
| 11036125 | Substrate positioning apparatus and methods | Travis Tesch | 2021-06-15 |
| 10995419 | Methods and apparatus for gallium nitride deposition | Brian H. Burrows, Kartik Shah, Shu-Kwan LAU | 2021-05-04 |
| 10932948 | Ultrasonic needles and transducer assemblies formed of non-metal materials or a combination of materials | Brian D. McCary, Toh Seng Goh, Matthew J. Fitzgerald | 2021-03-02 |
| 10930530 | Methods and apparatus for wafer temperature measurement | Ji-Dih HU | 2021-02-23 |