Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195914 | Transistor and method for forming a transistor | Patricia M. Liu, Flora Fong-Song CHANG | 2021-12-07 |
| 11177144 | Wafer spot heating with beam width modulation | Shu-Kwan LAU, Zuoming ZHU, Koji Nakanishi, Toshiyuki Nakagawa, Nyi O. Myo +1 more | 2021-11-16 |
| 11171023 | Diode laser for wafer heating for EPI processes | Schubert S. Chu, Douglas E. Holmgren, Kartik Shah, Palamurali GAJENDRA, Nyi O. Myo +5 more | 2021-11-09 |
| 11029297 | Method of gas composition determination, adjustment, and usage | — | 2021-06-08 |
| 11021795 | Multi zone spot heating in epi | Shu-Kwan LAU, Koji Nakanishi, Toshiyuki Nakagawa, Zuoming ZHU, Joseph M. Ranish +3 more | 2021-06-01 |
| 10943803 | Methods and assemblies for gas flow ratio control | Kevin Brashear, Ashley M. Okada, Dennis L. Demars, Jaidev Rajaram, Marcel E. Josephson | 2021-03-09 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |