Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Anzhong Chang +10 more | 2021-02-23 |
| 10883190 | Apparatus and methods for alignment of a susceptor | James Francis Mack, Paul Brillhart | 2021-01-05 |