Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Moritz Becker, Yves Lodewijk Maria Creijghton | 2021-12-14 |
| 11048180 | Component for use in a patterning device environment | Andrey Nikipelov, Vadim Yevgenyevich Banine, Christian Gerardus Norbertus Hendricus Marie Cloin, Marcus Adrianus Van De Kerkhof, Ferdinandus Martinus Jozef Henricus Van De Wetering | 2021-06-29 |