Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Andrea Illiberi, Moritz Becker, Edwin Te Sligte, Yves Lodewijk Maria Creijghton | 2021-12-14 |
| 11022893 | Optical assembly with a protective element and optical arrangement therewith | Stefan Schmidt | 2021-06-01 |