Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11199363 | Method for removing a contamination layer by an atomic layer etching process | Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Moritz Becker, Edwin Te Sligte | 2021-12-14 |