Moritz Becker — 2 Patents at Microsoft

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
11199363	Method for removing a contamination layer by an atomic layer etching process	Fred Roozeboom, Dirk Heinrich Ehm, Andrea Illiberi, Edwin Te Sligte, Yves Lodewijk Maria Creijghton	2021-12-14
11137687	Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma	Bjoern Liebaug, Kerstin Hild, Joachim Hartjes, Simon Haas	2021-10-05