Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137687 | Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma | Bjoern Liebaug, Moritz Becker, Kerstin Hild, Simon Haas | 2021-10-05 |
| 11054755 | Optical module with an anticollision device for module components | Alexander Wolf, Toralf Gruner | 2021-07-06 |