Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187990 | Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror | Johannes Lippert, Toralf Gruner, Philip Lucke, Mohammadreza Nematollahi | 2021-11-30 |
| 11137687 | Optical arrangement for EUV radiation with a shield for protection against the etching effect of a plasma | Bjoern Liebaug, Moritz Becker, Joachim Hartjes, Simon Haas | 2021-10-05 |
| 11029515 | Optical element, and method for correcting the wavefront effect of an optical element | Toralf Gruner, Vitaliy Shklover | 2021-06-08 |
| 10908509 | Mirror, in particular for a microlithographic projection exposure apparatus | Johannes Lippert, Toralf Gruner | 2021-02-02 |