Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187990 | Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror | Toralf Gruner, Kerstin Hild, Philip Lucke, Mohammadreza Nematollahi | 2021-11-30 |
| 10908509 | Mirror, in particular for a microlithographic projection exposure apparatus | Toralf Gruner, Kerstin Hild | 2021-02-02 |