Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187990 | Mirror for a microlithographic projection exposure apparatus, and method for operating a deformable mirror | Johannes Lippert, Kerstin Hild, Philip Lucke, Mohammadreza Nematollahi | 2021-11-30 |
| 11156922 | Method and device for determining the heating state of a mirror in an optical system | Willem Michiel De Rapper | 2021-10-26 |
| 11143967 | Projection exposure method and projection lens with setting of the pupil transmission | — | 2021-10-12 |
| 11054755 | Optical module with an anticollision device for module components | Joachim Hartjes, Alexander Wolf | 2021-07-06 |
| 11029515 | Optical element, and method for correcting the wavefront effect of an optical element | Kerstin Hild, Vitaliy Shklover | 2021-06-08 |
| 11003088 | Method and device for the correction of imaging defects | Franz Sorg, Peter Deufel | 2021-05-11 |
| 10908509 | Mirror, in particular for a microlithographic projection exposure apparatus | Johannes Lippert, Kerstin Hild | 2021-02-02 |